Fabrication of 4-Inch Wafer-Scale Heterostructure via PECVD drives AI Semiconductor Performance Innovation!
National Research Council of Science and TechnologyThe research team led by Senior Researcher Hyeong-U Kim of the Semiconductor Manufacturing Research Center of the Korea Institute of Machinery and Materials (KIMM) has achieved the world’s first successful fabrication of a 4-inch heterostructures semiconductor with using plasma technology.